40 CFR Appendix Table I-16 to Subpart I of Part 98 - Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing
Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing
Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing
| Manufacturing type/process type/gas | Default DRE
(%) |
|---|---|
| MEMS, LCDs, and PV Manufacturing | 60 |
| Semiconductor Manufacturing: | |
| CF |
87 |
| CH |
98 |
| CHF |
97 |
| CH |
98 |
| C |
93 |
| C |
93 |
| C |
97 |
| C |
95 |
| C |
98 |
| C |
97 |
| C |
98 |
| SF |
95 |
| NF |
96 |
| All other carbon-based fluorinated GHGs used in Semiconductor Manufacturing | 60 |
| N |
|
| CVD and all other N |
60 |
[89 FR 31922, Apr. 25, 2024]