40 CFR Appendix Table I-1 to Subpart I of Part 98 - Table I-1 to Subpart I of Part 98—Default Emission Factors for Threshold Applicability Determination
Table I-1 to Subpart I of Part 98—Default Emission Factors for Threshold Applicability Determination
Link to an amendment published at 89 FR 31919, Apr. 25, 2024.
| Product type | Emission factors EFi | |||||
|---|---|---|---|---|---|---|
| CF4 | C2F6 | CHF3 | C3F8 | NF3 | SF6 | |
| Semiconductors (kg/m 2) | 0.90 | 1.00 | 0.04 | 0.05 | 0.04 | 0.20 |
| LCD (g/m 2) | 0.50 | NA | NA | NA | 0.90 | 4.00 |
| MEMS (kg/m 2) | NA | NA | NA | NA | NA | 1.02 |
Notes: NA denotes not applicable based on currently available information.
[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68221, Nov. 13, 2013]